Precision Grinding & Lapping of Silicon Carbide (SiC) Components

Specialized mid-to-backend ultra-precision diamond grinding and lapping of Sintered and Reaction-Bonded SiC. Overcoming extreme material hardness to deliver high thermal conductivity and zero-warp flat surfaces.

Strategic Manufacturing Advantage

By pairing advanced grinding machinery with strong pre-forming supply partners, we focus on delivering large-scale flat SiC components with strict flatness tolerances and excellent erosion resistance.

Key Material Properties

Quantitative engineering data for design validation and material selection

Hardness
HV0.5 ≥ 22 GPa
Extreme microhardness, surpassed only by diamond, optimized via expert grinding
Density
3.10 - 3.15 g/cm³
Lightweight yet ultra-rigid structural material machined to tight specs
Thermal Conductivity
110 - 130 W/m·K
Excellent thermal dissipation for high-power semiconductor environments
Elastic Modulus
400 - 410 GPa
Ultra-high rigidity and zero mechanical deformation under severe physical loads
Max Service Temp
1350°C
Maintains superior mechanical fatigue resistance in demanding industrial environments
Flexural Strength
350 - 450 MPa
Outstanding structural reliability under abrasive sliding contact

Why Choose Silicon Carbide?

Silicon Carbide (SiC) delivers unmatched performance in extreme environments:

  • Extreme Hardness: HV0.5 ≥ 22 GPa provides exceptional wear resistance, second only to diamond among engineering materials.
  • Superior Thermal Management: Thermal conductivity of 110-130 W/m·K enables efficient heat dissipation in high-power semiconductor applications.
  • Ultra-High Rigidity: Elastic modulus of 400-410 GPa ensures zero deformation under severe mechanical loads, critical for precision wafer handling.

High-Value Applications

Proven performance in semiconductor equipment, severe industrial environments, and advanced automation

Semiconductor Equipment

  • Precision wafer vacuum chucks
  • Electrostatic chuck base plates
  • Wafer focus rings
  • Edge rings

Severe Industrial Environments

  • Heavy-duty mechanical seal faces
  • Chemical pump impellers
  • Abrasive slurry spray nozzles
  • Wear-resistant liners

Advanced Automation

  • High-rigidity alignment blocks
  • Dimensional guiding stages
  • Precision linear motion components
  • Near-zero thermal drift structures

Typical Mechanical & Thermal Properties

Reference data for Sintered Silicon Carbide at room temperature

PropertyTest MethodUnitValue
DensityISO 2738g/cm³3.12
Flexural StrengthISO 14704MPa400
Young's ModulusISO 17561GPa405
Vickers HardnessISO 6507HV0.5≥ 2200
Fracture ToughnessISO 23146MPa·m½3.5 - 4.5
Thermal ConductivityISO 22007W/m·K120
Coefficient of Thermal ExpansionISO 11372x10⁻⁶/K4.0 - 4.5
Dielectric StrengthIEC 60243kV/mm≥ 15
Volume ResistivityIEC 60243Ω·cm> 10¹⁰
Max Service TemperatureContinuous°C1350

Precision Machining Capabilities for SiC

Overcoming extreme hardness through advanced diamond grinding and lapping expertise

Large-Scale Flat Grinding

Precision surface grinding of large SiC plates (up to 500mm diameter) with flatness tolerances ≤ 0.002 mm, critical for wafer chucks and electrostatic chuck bases.

Ultra-Precision Lapping

Sequential diamond lapping achieving Ra 0.02 μm surface finish, eliminating subsurface damage and ensuring perfect planarity for vacuum sealing interfaces.

Complex Profile Grinding

CNC profile grinding for intricate geometries, stepped features, and angled surfaces using custom diamond wheel dressing and form compensation.

Thin-Wall Machining

Precision grinding of thin-wall SiC structures (down to 1.0 mm wall thickness) without fracture, enabled by optimized feed rates and coolant delivery.

Zero-Warp Processing

Stress-relief annealing and symmetric grinding strategies prevent warpage, maintaining dimensional stability through complete machining cycle.

Full Metrology Validation

100% flatness verification using laser interferometry and optical flats, with comprehensive FAI/OQC documentation including surface roughness measurements.

Validate Your Silicon Carbide Component Design with KoreCera

Submit your 2D engineering blueprints or 3D CAD files (.STEP / .IGS) below. Our expert engineering team will conduct an in-depth Design-for-Manufacturability (DFM) review and deliver a competitive direct-factory quote. Fast-track prototyping completed within 7-10 business days. Full FAI, OQC, and material traceability reports provided upon delivery.

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100% Strict NDA Protection Enforced

Submit Drawing for 24-Hour Review